Excimer laser lithography.

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography

This paper reports simulation and experimental details of a novel phase shifting technique based on laser interferomeiry. Phase shifting is one of the most promising techniques L 2 for the fabrication ofhigh density DRAM's. In recent years many kinds of phase shifting methods have been proposed to extend the resolution limit and contrast of image patterns . These techniques however, have severa...

متن کامل

Contact and proximity lithography using 193nm Excimer Laser in Mask Aligner

In this paper we describe the use of an Excimer laser for full-field lithography in a Mask Aligner. The DUV light from the Excimer laser is homogenized by using micro lens based optical integrators instead of a macro lens-array. A simulation of the intensity distribution for 5 μm squares was performed to visualize the diffraction effects and to show the potential of 193 nm illumination. It is d...

متن کامل

The Excimer Laser

By Maria Clara Arbelaez, MD; and Thomas Magnago, Dipl-Ing Due to recent advances in refractive surgery, the complexities of correcting irregular astigmatism can now receive closer attention than ever before. Today, subjective evaluation of the patient’s refractive deficit may not produce an accurate depiction of his preexisting astigmatism. To minimize poor postoperative results, the golden rul...

متن کامل

Excimer laser trabeculotomy.

ous fluid by producing 0.5-mm holes. There is no reference given to this observation, therefore it is not clear how this observation was determined. The article states that the laser fiber is 200  m. It is unclear how this would create 500m ostia. On page 286, an aiming beam is mentioned in the Surgical Technique section. However, unless the AIDA laser system has been modified, and this is not...

متن کامل

Excimer Laser - Facilitated Coronary

Background. Excimer laser coronary angioplasty has been reported to be a promising treatment for complex coronary artery disease. The purpose of this study was to define the predictors of acute success and restenosis after this experimental intervention. Methods and Resuls. A cohort of 200 consecutive patients had a minimum of 6 months of follow-up evaluation after treatment of 215 coronary ste...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Kobunshi

سال: 1990

ISSN: 0454-1138,2185-9825

DOI: 10.1295/kobunshi.39.620